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MEMSnet Home: MEMS-Talk: Selectivity on Silicon Etch by HNA to boron
Selectivity on Silicon Etch by HNA to boron
2010-09-27
morad massalha
Selectivity on Silicon Etch by HNA to boron
morad massalha
2010-09-27
I tried to do selectivity etch  P+(bulk) and to stop on the P-(EPI) for image
sensor thinning process, I do etch rate expirments while I measure delta Silicon
thickness from both sided, I get Etch rate for P+ 1mic/min and for EPI
0.5mic/min, according t litterature EPI ER should be very less. These exprments
I do in lab while I pu one peace of silicon on cup of HF:Nitric:Acetic 1:3:8.
Maybe I should do here electrochemical etching ? to get good selectivity.



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