Good morning.

At our side we use Paryleen as protective coating on top of the structured
front side.

Also Silicet has an holder for protecting the frontside during KOH etch.

best regards,

Peter Kuijpers
MiPlaza Technology Laboratories
Philips Research Europe
High Tech Campus 04
Postbox HTC-4-1
5656 AE Eindhoven
The Netherlands
Tel.: +31 402743667
         +31 612507027
Email: [email protected]

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Bhargav Nabar
Sent: Thursday 30 September 2010 18:22
To: [email protected]
Subject: [mems-talk] AMMT KOH etch wafer holder

Hi all,

I would like to protect the front side of my silicon wafer in a KOH wet etch
process. (30% conc 85 C). I have an aluminum oxide thin film on the front
side that needs to be protected from KOH. I also have Lpcvd silicon nitride
as the etch stop from the backside (I am trying to make suspended silicon
nitride membranes and the aluminum oxide thin film is supposed to be on the
top of the membrane) . I have tried using brewer science's Pro-Tek B3 but am
facing adhesion issues. I am contemplating using a mechanical clamp .Does
anyone have any experience with such clamps for eg, the AMMT clamp? Also any
alternative methods or suggestions about alternative clamp manufacturers
would be greatly appreciated.

Thank you
Bhargav Nabar
UT Arlington Nanofab.