A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TMAH+Triton surface quality
TMAH+Triton surface quality
2010-10-09
Andrea Mazzolari
2010-10-14
Prem Pal
2010-10-14
Bill Flounders
TMAH+Triton surface quality
Andrea Mazzolari
2010-10-09
Hi Prem,

i've read your paper "Complex three-dimensional structures in Si{1 0 0}
using wet bulk micromachining", really a nice job!

Just a question: which is the surface quality of (100) sufaces etched in
TMAH+Triton ? Is it possibile to achieve a (100) mirro-like surface ?

Best regards,
Andrea
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Harrick Plasma, Inc.
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing