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MEMSnet Home: MEMS-Talk: Re: what am i doing wrong with ti adhesion layers?
Re: what am i doing wrong with ti adhesion layers?
1998-11-07
Robert Okojie
1998-11-07
Kai Hiltmann
1998-11-07
Robert Okojie
1998-11-07
bob lyness
1998-11-07
[email protected]
Re: what am i doing wrong with ti adhesion layers?
bob lyness
1998-11-07
I don't know what the cause of the loss of reflection, but I suggest that
you try a thicker titanium layer, e.g.
50-100  nanometers of Ti, in order to avoid pinholing and provide an
adequate barrier and adhesion layer.
Good luck.

-----Original Message-----
From: andrew lyon 
To: [email protected] 
Date: Friday, November 06, 1998 11:36 PM
Subject: what am i doing wrong with ti adhesion layers?


>What am i doing wrong with Ti adhesion layers?  I am thermally
>evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion
>layers.  After a few days, the films turn from reflective Au to a frosty
>white color.  Is this titanium oxidation or some other diffusion process
>I am unfamiliar with?
>
>Thanks
>
>L. Andrew Lyon, Assistant Professor
>School of Chemistry and Biochemistry
>Georgia Institute of Technology
>Atlanta, GA  30332
>
>[email protected]
>
>


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