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MEMSnet Home: MEMS-Talk: pyrex wafer thickness for anodic bonding
pyrex wafer thickness for anodic bonding
2010-10-14
Robert MacDonald
2010-10-14
Dr. Holger Becker
2010-10-15
Li zhuang
2010-10-14
Dean Hopkins
2010-10-15
Tony Rogers
pyrex wafer thickness for anodic bonding
Robert MacDonald
2010-10-14
Wondering if anyone has any experience anodic-bonding pyrex wafers to
silicon wafers, where the pyrex is thicker than normal.

For a 100mm wafer typical thicknesses I've worked
with are in the 400-600um range. Has anyone had experience working with
wafers 2 or 3 times thicker?

Rob MacDonald
Shearwater Scientific
reply
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