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MEMSnet Home: MEMS-Talk: Looking for non-UV resist chemistries
Looking for non-UV resist chemistries
2010-10-26
Nathan McCorkle
Looking for non-UV resist chemistries
Nathan McCorkle
2010-10-26
Background:

I am trying to achieve results with PDMS or harder substrates to make
microfluidic devices for biology.

I did some tests etching PDMS with a 10um CO2 laser on an XY stage
(versalaser system)... the channel bottoms weren't too pretty (looked
like swiss cheese) and spallation was present near the edges. This
left an undesirable channel, but I never got any further because I
stopped working on the project when I was unsure about how to make
macro-to-micro ports for injecting agarose. (also was related to time
constraints)

An excimer laser would likely solve the spallation and ugly channel
problems, but they're too expensive.

So I guess I'm looking for a good resist that I can expose with a
wavelength associated with cheaply available solid state lasers, which
I will add to a custom XY stage on micro-actuators.

Any suggestions for resists? I have an 830nm laser now, and have
access to others (eBay).

--
Nathan McCorkle
Rochester Institute of Technology
College of Science, Biotechnology/Bioinformatics
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