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MEMSnet Home: MEMS-Talk: SU8 two layer lithography
SU8 two layer lithography
2010-10-26
Abhishek Jain
2010-10-26
Gareth Jenkins
2010-10-26
Abhishek Jain
2010-10-27
Gareth Jenkins
2010-10-27
Kevin Nichols
2010-10-27
Ragıp Abdullahoğlu
SU8 two layer lithography
Ragıp Abdullahoğlu
2010-10-27
Hello, i m wondering how the KMPR 1000 DRIE performance as a mask on Silicon
instead of SU8 ? For my applications i achieve 1:10 selectivity for Si:SU8, and
how about the KMPR 1000?  i haven't bought it yet. I have already search it on
internet but couldn't find anything.  if there is any information i need for
that.

Thank you

Ragip  Abdullahoglu
Biomems Lab.
Istanbul Technical University
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