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MEMSnet Home: MEMS-Talk: SU8 two layer lihtography
SU8 two layer lihtography
2010-10-27
Kumar, Parshant
SU8 two layer lihtography
Kumar, Parshant
2010-10-27
Hi,

I'm not able to understand why you are doing two layer if it is
possible to get 45 um thickness of using single layer of coating of
either SU8-2000 series or SU8-3000 series?  If you have to do it
two coat, then use single series to get the desired thickness in two coat
instead of using two different series since solvent driven out of the two
layer system will be problematic.

Good luck!
Parshant
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