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MEMSnet Home: MEMS-Talk: ingot slicing
ingot slicing
2010-10-28
Andrea Mazzolari
ingot slicing
Andrea Mazzolari
2010-10-28
Hi all,

i'm looking for someone who could slice a 4''(110) silicon ingot. I need
wafers with off axis less than 0.005 deg, and (111) flat with accuracy
better than 0.01 deg.

Best regards,
Andrea

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