A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Increasing value of an integrated capacitor
Increasing value of an integrated capacitor
2010-11-17
Christian Engel
Increasing value of an integrated capacitor
Christian Engel
2010-11-17
Hello people,

what I want to do: Bonding two slices of glass, each with a size of about
1cm². One piece will have an etched cavity.
On both inner planes there will be metallic electrodes, positioned towards
each other, building a simple capacitor.

By the given geometrical dimensions there is no possibility for reaching the
desired capacitance of about 200pF (Space between the electrodes would be
<3µm. That's precious little.) Furthermore no dielectric is available except
O2 (of course). Are there any known geometric structures or other ways for
increasing the value of my capacitor? An external discrete SMD-capacitor is
the last possibility I want to attempt.

Many thanks in advance, Chris



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Harrick Plasma, Inc.
The Branford Group
MEMS Technology Review