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MEMSnet Home: MEMS-Talk: Glue for ion beam etching
Glue for ion beam etching
2010-11-23
Grimm, Dr. Daniel
2010-11-23
Brad Cantos
2010-11-24
Pramod Gupta
Glue for ion beam etching
Grimm, Dr. Daniel
2010-11-23
Hi,

we have an Argon ion beam etcher from Roth & Rau. In this etching
machine, the samples are upside-down. In order to prevent them from
falling into our turbo, we are using silver glue. However, for obvious
reasons (a lot of contamination), I want to change the glue.

Does anyone have experience with a high vacuum glue which is thermal as
well as electrical conductive and which is easy to remove with normal
solvents (acetone, NMP, DMSO, KwikStrip)?

Best wishes
Daniel
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