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MEMSnet Home: MEMS-Talk: SU-8 2100 PreBake & PostBake Time
SU-8 2100 PreBake & PostBake Time
2010-11-23
Nirmal punjabi
2010-11-23
Andrew Sarangan
2010-11-23
Brad Cantos
SU-8 2100 PreBake & PostBake Time
Nirmal punjabi
2010-11-23
Hello,

I am working with SU-8 2100, the datasheet gives some Prebake & Postbake
timings. Till now i was using Silicon wafer as substrate for making SU-8
structures. I want to use some other material like glass slide or acrylic as
substrate.

Does substrate material or thickness has effect on prebake or post bake
time?

If Yes, how to change Baking time with different substrates?

Thank You.
reply
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