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MEMSnet Home: MEMS-Talk: Uneven surface thickness of SU-8 2100
Uneven surface thickness of SU-8 2100
2010-12-01
Nirmal punjabi
2010-12-01
Alex Mellnik
2010-12-02
[email protected]
2010-12-02
Xiaohui Lin
2010-12-02
Michael Riss
Uneven surface thickness of SU-8 2100
Nirmal punjabi
2010-12-01
Hi,

I need a thickness of around 400um of SU-8, i am spin coating SU-8 2100 at
800rpm for 60 sec.

But the final structure formed has uneven surface.

Can anyone help me on this matter?

Thank you.

Nirmal.
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