If you deposited Au on glass and Ti on top of the Au, the problem is
that Au does not adhere to glass very well.  You will need to use some
Ti under the Au.

If you deposited the Ti on the glass and Au on top, then the problem is
most likely related to glass surface preparation.  What cleaning did you
perform before the deposition?

Also, what are the thicknesses of the films in question?

Dan Ruiz

________________________________

From: [email protected] on behalf =
of Binh Tran
Sent: Thu 12/2/10 8:06 PM
To: MemsTalk
Subject: [mems-talk] Au/Ti adhesion problem

Hi all

I'm having a problem with the Au/Ti adhesion on glass wafer as follow :

I had finished the Au/Ti coating process on the glass wafer (piranha
treated), there is no problem. Then I used some of them for my
experiment at that time (the adhesion was good) and kept the others for
the later use.

After a few days when I used the others and there was a problem with the
Au/Ti layer. They became sensitive and easily peel off even when washing
with DI water. I don't know why there is a different adhesion between
the first and the second time using. Does anyone face this problem
before ?

Thank you

Binh Tran
MS Candidate - Nano System
Kyungwon University - Korea