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MEMSnet Home: MEMS-Talk: how to drill a hole in a silicon wafer
how to drill a hole in a silicon wafer
2010-12-05
Petru Lunca Popa
2010-12-06
Xiaohui Lin
2010-12-07
shimul saha
2010-12-06
Kuijpers, Peter
2010-12-06
Shay Kaplan
2010-12-07
Nabhiraj Yalagoud
2010-12-07
Andrew Sarangan
2010-12-09
Nabhiraj Yalagoud
2010-12-09
Ned Flanders
2010-12-10
Gomez, Mikel
how to drill a hole in a silicon wafer
Petru Lunca Popa
2010-12-05
Hi,

I have just an ordinary Si/SiO2 commercial wafer and I want to to
put a hole in it . The shape is not so important. Area should be around one
mm squared or less.

Any ideea how to do this without breaking the wafer?
Mechanical or chemical methods?

Thank you
Petru
reply
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