Hi everyone,

I need to make arrays of 100um holes in thin PDMS film (thickness 1~2mm). The
thin PDMS film with holes would be peeled off for use. I tried to pattern SU-8
cylinders on silicon wafer and then spin coated PDMS on it to form holes.
However, it is very hard to release the PDMS by hand. The area with the feature
is easy to break during releasing. Anyone done this before? Any suggestions?

Also I'm thinking about punching holes after peeling the PDMS film off. Does
anyone have the experience of punching 100um or even smaller holes in thin PDMS
film? Any idea about what kind of tools to use?

Or any other idea about making this kind of PDMS thin films with 100um holes,
and possible to peel off?

Many thanks,

--
Yiwei Yan
Graduate Student
Mechanical Engineering
University of Colorado at Boulder
[email protected]