Hello,

First of all, I am new in this MEMS-talk so I hope I am answering the right way.

I also am interested in possible alternatives of drilling holes in silicon
wafers, but there are some things I would like to know regarding the answer
posted before:

- Regarding the mentioned glue used in Kapton tape, what type of glue is it? We
use kapton for other applications but without any glue.

- Once the hole is drilled in the wafer, what kind of remover can be used to
strip off the kapton from the Silicon wafer?

Regards,

Mikel Gómez Aranzadi
CEIT
bioMEMS Group
Microelectronics and Microsystems
SPAIN


-----Original Message-----
From: Nabhiraj Yalagoud [mailto:[email protected]]
Sent: jueves, 09 de diciembre de 2010 7:02
To: General MEMS discussion
Subject: Re: [mems-talk] how to drill a hole in a silicon wafer

kapton is not attacked by HF. So u can use kapton as mask and etch HF.
Kapton is also not attacked by KOH.

both etchants you can use separately as two different methods. There may be
little lateral seepage, but when we are talking about 1 mm hole, you may get
1.1 mm, it should not matter much. Glue used in Kapton tape, is not easily
etched by KOH.