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MEMSnet Home: MEMS-Talk: Making contacts to large chunky objects
Making contacts to large chunky objects
2010-12-10
Alex Mellnik
Making contacts to large chunky objects
Alex Mellnik
2010-12-10
Hi everyone,

I may have access to bulk-grown samples of the material that I am studying,
and am trying to figure out if there's any reasonable way to incorporate
them into a standard device geometry.  Does anyone know of any good tricks
for mounting a ~2x2x0.5 mm crystal on a wafer for further processing?  So
far I have thought about dropping into a hole etched in a glass wafer,
filling with oxide and planarizing, or casting in thick SU8 and then
planarizing.   Any ideas?  Thanks,

Alex
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