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MEMSnet Home: MEMS-Talk: Dry Dicer for GaAs wafer
Dry Dicer for GaAs wafer
2010-12-12
Grimm, Dr. Daniel
2010-12-13
Yiming Lai
Dry Dicer for GaAs wafer
Yiming Lai
2010-12-13
Hi

I know just a diamond scriber can work for 6mmx6mm pieces as long as you
dice along the lattice axis, but I never tried down to 2mm.

Yiming

On Sun, Dec 12, 2010 at 6:46 PM, Grimm, Dr. Daniel
wrote:

> Hi,
>
> I am looking for a tool to dice wafers into small (~6mm) and sometimes
> very small pieces (down to 2mm). The tool should scribe and break GaAs
> pieces; no automation is required. The aim is a reliable
> (low-throughput) but low budget tool for our research facility.
>
> Any suggestions are highly welcome!
>
> Daniel

--
Yiming Lai
reply
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