Gareth,
                SU8 is an epoxy based resist and does not work with
HMDS.  A preferred adhesion promoter would be either APTES or APTMS or
an epoxy based adhesion promoter such as 3-GOPS.  All of which work with
SU8.  Unfortunately the vapor pressure of these chemicals is such that a
simple YES vacuum vapor primer does not work.  We have developed special
systems the 1224P or the LabKote for special chemicals.

Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of Gareth Jenkins
Sent: Sunday, December 12, 2010 8:43 AM
To: General MEMS discussion
Subject: Re: [mems-talk] SU-8 3000 vs 2000 adhesion

I have also read that HMDS can make adhesion worse if any moisture gets
involved.

As for glass, I have only every tried the standard formulation. I could
get good adhesion (without HMDS) but it wasn't easy.
I too would be interested in finding out more about the 2000 &
3000 formulations. Does anyone know what solvents they actually use?