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MEMSnet Home: MEMS-Talk: Resist sticking on Gold
Resist sticking on Gold
2011-01-20
Steckenborn, Arno
2011-01-21
Edouard Duriau
2011-01-23
Michael D Martin
Resist sticking on Gold
Edouard Duriau
2011-01-21
Hello Arno,

Have you tried using adhesion promoter? (HMDS,...)

Best regards,

Edouard Duriau
CS-ABS Imaging Engineer
ASML


On Thu, Jan 20, 2011 at 1:56 PM, Steckenborn, Arno <
[email protected]> wrote:

> Hello,
>
> Has anyone experience in improved adhesion of photoresist on Gold-surfaces
> for plating of Gold ? After change of resist we experience poor adhesion and
> undergrowth followed by delamination and flaking.
>
> Thanks in advance
> Arno
reply
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