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MEMSnet Home: MEMS-Talk: undercut the sacrificial AlGaAs layer
undercut the sacrificial AlGaAs layer
2011-02-03
Yiming Lai
2011-02-03
Mark Goorsky
2011-02-03
Yiming Lai
undercut the sacrificial AlGaAs layer
Yiming Lai
2011-02-03
yes, sorry I forgot to mention that, it is Al0.7Ga0.3As

Thanks,

lmign

On Thu, Feb 3, 2011 at 12:06 PM, Mark Goorsky  wrote:

> What is the Al composition?  Has a huge impact on etch rate.

--
Yiming Lai
reply
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