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MEMSnet Home: MEMS-Talk: Adhesion of PDMS to thin metal films
Adhesion of PDMS to thin metal films
2011-02-10
Ned Flanders
Adhesion of PDMS to thin metal films
Ned Flanders
2011-02-10
Hi all,

I am planning on using PDMS as a sort of gasket between metallized
silicon chips. I would need the connection between a chip and the PDMS
layer to be as permanent as possible. The metal films in quesion are
aluminum, chromium, gold and platinum.

How good will the adhesion be? And would activating the PDMS with
oxygen plasma do me any good?

cheers

m
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