Depends upon the thickness of the resist.  I have not used SU8 but with standard
negative resist think approximately the same resolution as the thickness of the
resist.  With standard positive resist think about 25 to 50% of the resist
thickness.  With resolution tricks like image reversal thing about 10% of the
positive resist thickness.  Best resolution I have seen is 0.08 micron lines and
spaces using reversal and 2 microns of positive resist.  Bill Moffat

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Michael
Cooke
Sent: Monday, February 28, 2011 8:07 AM
To: General MEMS discussion
Subject: Re: [mems-talk] photolithography resolution (su-8 series)

You should be able to easily get better than 5 microns

Dr Michael Cooke