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MEMSnet Home: MEMS-Talk: Sloped microchannel
Sloped microchannel
2011-02-28
Tsoll Doiiu
2011-02-28
Nabhiraj Yalagoud
2011-02-28
Dr. Holger Becker
2011-03-04
khan waseem
2011-02-28
Dietrich Lueerssen
2011-02-28
Nabhiraj Yalagoud
2011-02-28
Kevin Nichols
2011-02-28
Bill Moffat
2011-03-01
Kevin Nichols
2011-03-01
Shao Guocheng
2011-03-11
eowin rohan
Sloped microchannel
Kevin Nichols
2011-03-01
Bill,

Take a look at his desired feature size though. He wants a strip that
is 4 *cm* long, with the slope running the entire length of that
feature. Are you suggesting an image reversal process to provide a +22
to -22 degree angle over a total length of 4 cm?

- Kevin

On Mon, Feb 28, 2011 at 3:22 PM, Bill Moffat
 wrote:
> Slopes in positive resist are easy. +22 degrees to -22 degrees from the
vertical, flood exposure allows perfect control of angle, using image reversal.
I have personally done 40 microns thick positive resist.  Thicker is possible
but would need experiments.  Bill Moffat.
reply
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