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MEMSnet Home: MEMS-Talk: Cr/Au peel off when electroplating?
Cr/Au peel off when electroplating?
2011-03-09
Sheng Zhang
2011-03-09
JVN
2011-03-09
Kagan Topalli
2011-03-10
Mendis, B. Upul Heyshan DR
2011-03-10
David Roberts
2011-03-11
Sheng Zhang
2011-03-14
David Roberts
Cr/Au peel off when electroplating?
Sheng Zhang
2011-03-09
Hi, All,

I'm having trouble electroplating Au onto Cr/Au (15nm/55nm) seed layer
on quartz substrate. I used lift off process to pattern the metal, and
the patterns are fine after lift off. But when electroplating, the
pattern comes off (in one piece, so definitely an adhesion problem).
Does the electroplating solution or temperature affect adhesion?

Any advice would be greatly appreciated!

Thanks!
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