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MEMSnet Home: MEMS-Talk: crystal axis alignment for anisotropic wet etch of silicon
crystal axis alignment for anisotropic wet etch of silicon
1999-05-21
[email protected]
crystal axis alignment for anisotropic wet etch of silicon
[email protected]
1999-05-21
I'd like to make comb-like microstructures using anisotropic
wet etch of <110> silicon wafers in KOH solution.
Please let me know how to align to crystal axis during silicon etch.
Thank you.

Dongwan Kim


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