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MEMSnet Home: MEMS-Talk: Hello... about E-gun evaporate glass...
Hello... about E-gun evaporate glass...
1999-05-21
Lee Jia-Hong
Hello... about E-gun evaporate glass...
Lee Jia-Hong
1999-05-21
Hi MEMSer...
    I am try to do bonding Silicon to Silicon with thin E-gun evaporated
7740 glass layer...
    Does anybody have such experience on this? Any suggestions?
    Besides I can't find the target for this process , should I directly cut
the 7740 glass substrate as the target? Would this damage the E-gun chamber?
    Or, any alternatives?
    Thanks a lot,
Best regards,
____________________________________________
Jerry Lee
(Jia-Hong Lee)

Insitute of Applied Mechanics,
National Taiwan University
Taipei, Taiwan, ROC

e-mail:
[email protected]
[email protected]

"Try then error is better than no try"


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