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MEMSnet Home: MEMS-Talk: Process Info. Request
Process Info. Request
1999-05-21
Tim Thomas
Process Info. Request
Tim Thomas
1999-05-21
I'm interested in an inexpensive, easy to apply resist that will hold up
in hot sulfuric acid.

My application is very crude.  I do not need anything close to the
level of control necessary for microlithography.

I would like to use broad-band UV as my source during exposure.

I would like to know:

What the resist could be and where to get it.

How is the resist developed and what the developer is.

How to remove the resist after processing.

Thank you,

Tim Thomas

[email protected]
[email protected]


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