I was able to create free standing SU-8 structures using a silicon
substrate by spinning OmniCoat on the wafer first. During the develop
the SU-8 released from the substrate.

Jonathan Abbott


>
>   1. Si Etch with KOH (Aarthi lavanya)
> Hi,
>
> I have structures sitting on Si wafer and it is covered with layer of Su-8.
The main idea is to etch away Si and have a Su-8 layer with structures on it.
>
> I've been trying to etch Si using KOH and always end up with gooey looking
liquid and the Si looking all messed.
>
> Suggestions please ..
>
> Cheers
> Aarthi