yes O2 plazma can be also another good option but not sure of the etch rate.

On Wed, Jun 8, 2011 at 3:26 PM, Zijian Cao  wrote:

> O2  Plasma.
>
> On Wed, Jun 8, 2011 at 4:24 PM, Le Hong Hanh  wrote:
>
> > Please show me your experience on removing this PR!