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MEMSnet Home: MEMS-Talk: TMAH doesn't attack some of (100) silicon wafers
TMAH doesn't attack some of (100) silicon wafers
2011-07-06
胡小东
2011-07-06
Andrea Mazzolari
2011-07-06
UDDIPTA CHATTERJEE
2011-07-06
Morrison, Richard H., Jr.
TMAH doesn't attack some of (100) silicon wafers
胡小东
2011-07-06
Hi, all,

While etching  (100) silicon wafers,  most of wafers were etched normally.
But few of (100) silicon wafers of the same batch were not etched at the initial
time. It seems that the initial reaction just didn't take place.

Has anyone had this experience?

Thanks!


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