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MEMSnet Home: MEMS-Talk: Deposition of PECVD oxide on Pt or Cr films
Deposition of PECVD oxide on Pt or Cr films
1999-05-31
Li Shi
Deposition of PECVD oxide on Pt or Cr films
Li Shi
1999-05-31
Could anyone tell me whether PECVD oxide can be deposited on Pt
and Cr films? Will the deposition alter the chemical composition or physiclal
properties of the Pt ot Cr film? The two metal films are patterned on
silicon nitirde.

Thanks.

Li Shi


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