A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Tolerance of CrAu films to high temperature shock?
Tolerance of CrAu films to high temperature shock?
2011-08-26
胡小东
Tolerance of CrAu films to high temperature shock?
胡小东
2011-08-26
Hi All,

We sputtered CrAu metal films onto a layer of silicon dioxide on the topside of
silicon wafers, then thickened the Au film by electroplating to about 3 microns.
We did the film adhesion test by spot-wielding Au tape and pulling the Au tape.
Sometimes the film under the wield spot were pull off, sometimes not. While
doing the Ultrasonic/Thermosonic  tape bonding and pulling test, it shows that
the film adhesion is good.
It seems that Some batch of CrAu films couldn't bear temprature shock by spot-
wielding.
How could we improve the tolerance of CrAu films to high temperature shock?
Does anyone has the similar experience?

Thanks!
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing