MEMS-talk

News	MEMSnet Home: MEMS-Talk: Recipe of Ar plasma etching gold Recipe of Ar plasma etching gold 2011-10-12 Yingtao Tian 2011-10-12 Bill Moffat 2011-10-12 Matthieu Nannini, Dr. 2011-10-12 志修梁 2011-10-12 Yingtao Tian 2011-10-13 Kirt Williams 2011-10-30 Khaled Mohamed Ramadan 2011-10-31 Kirt Williams Recipe of Ar plasma etching gold Matthieu Nannini, Dr. 2011-10-12 Ar plasma etch is a sputter etch process. So nothing magic here. Work at low pressure (mT range), and tune your power to get an acceptable etch rate. reply
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