I used MA6 aligner, 7.4mW, 8s exposure

On Wed, Nov 9, 2011 at 6:30 AM, Kuijpers, Peter
wrote:

> Hi all,
>
> What is the energy you've used?
>
> regards,
>
> Peter Kuijpers

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: [email protected]
Office: (512) 471-4349