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MEMSnet Home: MEMS-Talk: week adhesion of SU8 to glass or quartz
week adhesion of SU8 to glass or quartz
2012-03-06
Xiaohui Lin
2012-03-07
Kipp Schoenwald
2012-03-07
Xiaohui Lin
week adhesion of SU8 to glass or quartz
Xiaohui Lin
2012-03-06
hi all:

    Could any one suggest how to improve the adhesion of SU8 2005 to glass
or quartz?

     I tried glass+omnicoat+SU8, it is week. I also tried
quartz+omnicoat+SU8 , but still peel off when I put in plating solution
(pH=5).

    Will HMDS work? or other adhesion promoter?

thanks
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