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MEMSnet Home: MEMS-Talk: Intermediate layer of tantalum
Intermediate layer of tantalum
2012-03-09
Lina Gonzalez
2012-03-12
Michael Martin
2012-03-23
David Roberts
2012-03-23
Maria Matschuk
2012-03-23
Kevin Nichols
Intermediate layer of tantalum
Lina Gonzalez
2012-03-09
Hi all,

What is the special interaction between sputtered tantalum on glass that
makes tantalum stick to glass? For example, why would you want a Ta layer
before depositing NiFe when having a glass substrate?

Thanks,

Lina


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