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MEMSnet Home: MEMS-Talk: Re: wax for KOH etching
Re: wax for KOH etching
1995-11-15
Osamu Tabata
Re: wax for KOH etching
Osamu Tabata
1995-11-15
We are using the following wax:
PROTECT WAX KPW-A
maker: Nikka Seiko
address: 1-13-7, Sangenjaya, Setagaya-ku, Tokyo, Japan
Tell 03-3424-1511
Fax 03-3424-2361

This wax withstand KOH ethcing around 2 hours. It melts around 200 C and it can
be easily removed by trichlorethylene at room temperature.

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Osamu Tabata, Ph.D.
Researcher
Toyota Central Research and Development Laboratories, Inc.
Nagakute-cho, Aichi-gun, Aichi-ken 480-11, Japan

TEL: +81-561-62-6111  ext. 3553
FAX: +81-561-63-5743
E-mail: [email protected]
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