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MEMSnet Home: MEMS-Talk: SU-8 2005 overexposed?
SU-8 2005 overexposed?
2013-01-17
Jocelyn Ng
2013-01-18
Andrew Sarangan
2013-01-18
Gareth Jenkins
2013-01-19
Jocelyn Ng
2013-01-19
Gareth Jenkins
2013-01-21
Brubaker Chad
2013-01-21
Jocelyn Ng
2013-01-22
Brubaker Chad
2013-02-04
Jocelyn Ng
2013-02-04
Bill Moffat
SU-8 2005 overexposed?
Jocelyn Ng
2013-01-17
Hello,

I'm doing single layer SU8 2005, thickness ~6-7um. I use 60mJ/cm^-2 on sputtered
gold surface. But somehow sometimes I notice that the edges of my pattern
darkens, I suspect it's due to overexposed. But 60mJ is quite a low dose
compared to the recommended one. I would appreciate any comments given. Thank
you.

Best Regards,
Jocelyn

Sent from my iPhone
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