Shib,
Have you gotten your result? Love to see an update.


On Tue, Jan 10, 2012 at 2:11 PM, Shiv GD  wrote:

> Thank you all for your suggestions.
>
> I highly appreciate your response.
>
> As, I currently don't have the required chemicals you suggested for the
> alternate sacrificial layer, I am trying to coat the AZ sacrificial layer
> with ~1um Parylene (to protect it from the SU-8 Developer) and than
> spincoat SU-8 on top. I shall try it this week and update my results here.
>
> Thank you once again for your help.
>
> Regards,
> Shib
>
> On Sun, Jan 8, 2012 at 3:13 PM, Khaled Mohamed Ramadan <
> [email protected]> wrote:
>
> > The only thing I think you could do is to change the sacrificial layer
> > I would suggest PMGI with the following process explained in this paper
> > Polydimethylglutarimide (PMGI) as a sacrificial material for SU-8
> > surface-micromachining:
> >
> >    http://iopscience.iop.org/0960-1317/18/7/075011
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