A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU8 for Au Plating
SU8 for Au Plating
2013-03-19
Jocelyn Ng
2013-04-04
Kevin Nichols
2013-04-04
Michael Martin
2013-04-03
André Bödecker
2013-04-03
Bill Moffat
2013-04-04
Jocelyn Ng
2013-04-04
André Bödecker
SU8 for Au Plating
Kevin Nichols
2013-04-04
Switch from SU-8 to KMPR (also from Microchem). SU-8 isn't meant to be
easily removable, whereas KMPR is specifically designed for robustness
during electroplating followed by a relatively easy removal.

- Kevin


On Mon, Mar 18, 2013 at 9:33 PM, Jocelyn Ng  wrote:

> Dear all,
>
> I'm using SU-8 2005.
> I soft bake at 65C_540S, exposure dose is 60mJ and post exposure bake at
> 95C-120S.
>
> Recently I encounter a problem where, after undergone gold plating process,
> photoresist residue remains.
> My stripping(remover PG) process is at 65C for an hour followed by acetone
> bath in ultrasonic.
> My plating temperature is about 45C for 25minutes.
>
> I tried to strip in remover PG for another 30minutes but nothing seemed to
> be working.
> I had tried using the same condition previously and did not encounter this
> problem.
>
> I need some advice or comments on this.
> Thanks a lot in advance.
>
> Best Regards,
> Jocelyn
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
Addison Engineering
MEMStaff Inc.