Vacuum psi?

*

nahid vahabi  wrote:

>Hello all,
>I deposit a 250 nm PECVD SiN layer as the dielectric between two gold layers
and the metal layers seem to be short through the nitride each time. I increased
the nitride thickness to 400 nm and still the same. I gathered that PECVD
nitride is quite notorious for the pinholes so I multi-layered the nitride (6
times of 40 nm each) to get rid of pinholes. It worked only on 1 wafer and then
the same problem again. So I appreciate any comments on this and whether you
think changing the dielectric is a good option.
>
>Thank you,
>Nahid
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