Hi Kevin,

I've just been calibrated on the cost for an X-ray exposure, so I am definitely
going the wrong direction looking at this route.

I'm was looking for an improvement on some work that I'm doing in SU-8 in terms
of high aspect ratio resolution, but the cost is prohibitive with X-ray for
sure. I wasn't that familiar with LIGA in its entirety to begin with, saw
synchrotron and just assumed it could be done with a different exposure source.
Then I read the exposure times were >6 hours WITH a synchrotron and started to
realize I was probably going to have to pursue another route.

Thanks,
Dave C

From: Kevin Nichols [mailto:[email protected]]
Sent: Tuesday, August 06, 2013 1:42 PM
To: David Casale; General MEMS discussion
Subject: Re: [mems-talk] X-ray Litho

Traditional LIGA requires a synchrotron, which isn't the sort of thing you want
to be building unless you're a national government. Foundries are out there that
have access to them, but why don't you describe what you want to build in a bit
more detail first? Odds are you don't need LIGA, and can get away with a more
widely accessible technique (DRIE, etc.).

- Kevin

On Tue, Aug 6, 2013 at 5:42 AM, David Casale
> wrote:
Does anyone know of a company that offers X-ray litho as a service? I'm looking
for LIGA like structures in PMMA, but I don't think it's possible to really step
into that realm without significant investment of money and resources. I'm not
even sure exactly what a source would cost, but my understanding is that it's
quite a lot of money, but there is not a whole lot of detail that's easily
found.

Thanks,
David Casale
R&D Engineer
www.maxlevy.com
Max Levy Autograph
2710 Commerce Way
Philadelphia, PA 19154 USA
tel: 215-842-3675

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