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MEMSnet Home: MEMS-Talk: SU-8 bonding with glass
SU-8 bonding with glass
1999-07-04
Justin A. Holzer
SU-8 bonding with glass
Justin A. Holzer
1999-07-04
In trying to get SU-8 to work as a photoresist on glass, I've had a hard
time getting the SU-8 to stay on the glass once I start developing it in
the SU-8 developer.
Does anyone know if I an adhesion layer on the glass under the SU-8?  or
is there still another solution?
Also, is SU-8 supposed to bond with (and stick to) a silicon wafer when
processing it as a photoresist, even after placing it in the SU-8
developer?

Any suggestions will help.
Thanks in advance.

Justin Holzer

[email protected]


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