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MEMSnet Home: MEMS-Talk: Chemical Vapor Deposition System
Chemical Vapor Deposition System
2014-01-29
Judith Linacero Blanco
2014-01-30
Bill Moffat
2014-02-01
James Guenes
2014-01-30
Lisong Zhou
Chemical Vapor Deposition System
Judith Linacero Blanco
2014-01-29
Hi,

I work at the Nanotechnology Platform of IBEC Institute of Barcelona, and
we would like to use NIL system to replicate a nanolithography silicon
master (with lines 50nm width).

We need a Chemical Vapor Deposition system to deposite fluorinated silane
to improve the antiadhesion properties between the master and the polymer.

Do you know where we can do this?
Thanks a lot.
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