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MEMSnet Home: MEMS-Talk: suitable etchant for titanium thin layer on silicon substrate
suitable etchant for titanium thin layer on silicon substrate
2016-05-31
KarthiKeyan K (2 parts)
2016-06-02
Sales (2 parts)
2016-06-02
Morrison, Richard H., Jr. (2 parts)
2016-06-02
Ricky Anthony (3 parts)
2016-06-02
Xing Sheng (2 parts)
2016-06-02
Shay
suitable etchant for titanium thin layer on silicon substrate
KarthiKeyan K
2016-05-31
Dear Friends,

Kindly suggest suitable etchant for titanium thin layer on silicon
substrate. (PPR mask pattern over the titanium thin layer)

Looking forward to you reply.

--

Thanks & Best Regards,
*KarthiKeyan K*

​
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