Chandra Kavita,

        I have found that AZP4620 is a good choice in the 5 - 10 micron
range.  Electronic Visions has been working with thick resists and has
developed excellent starting parameters for AZP4620.  If you would like a
copy please email [email protected]   or call
(602)-437-9492 and I will send you a copy.


Loren St. Clair
Staff Engineer
Electronic Visions

Phone: (602)-437-9492 x 121
Fax: (602)-437-9435

Email: mailto:[email protected] 

        -----Original Message-----
        From:   Kavita  Chandra [SMTP:[email protected]]
        Sent:   Wednesday, July 14, 1999 7:18 AM
        To:     [email protected]
        Subject:        Thick resist


        What kind of resist would be used for
        thick resist (5-10um) applications &
        any information on its parameters like
        spinning speed, patterning etc.

        Thanks,
        Kavita Chandra