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MEMSnet Home: MEMS-Talk: Re: P+ etch stop
Re: P+ etch stop
1995-11-15
Katalin Voros
Re: P+ etch stop
Katalin Voros
1995-11-15
We do P+ diffusion using BORON+ source wafers. Lenght of time depends on the
membrane thickness you want. If you wish to persue this further send me a few
details. Also, you might want to look on the web at http://
argon.eecs.berkeley.edu:8080/

Sincerely
*


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