I am designing an academic fab (we are moving to a new building). I
am following the basic design of our present facility ... painted gypsum
board (dry wall) walls, modular HEPAs in a T bar ceiling, and softwalls
for air return (It's inexpensive and works: ours is class 100). However,
I have a few questions:

1) What should the temperature and humidity control be in the
lithography (Temp and delta T --- RH and delta RH) ?

2) What type of epoxy paint should I specify for the walls ? Any
recommended suppliers ?

3)Any suggestions on the flooring ? We presently have 1' square vinyl
tiles. I have seen references to rolled vinyl. Is there any recommened
suppliers or types to look out for.

  Any help is appreciated.

    Ken Westra
    MicroFab at the University of Alberta

PS Thanks to all the people in this mailing list who have answered my
questions over the past year. They have been very useful.